Assignment of Assignor's Interest

Recorded: 2015-01-23 Pages: 5

Assignors

DEVILLIERS, ANTON J.

Executed: 2015-01-19

FULFORD, DANIEL

Executed: 2015-01-23

Assignee

TOKYO ELECTRON LIMITED

3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, 107-6325, JAPAN

Covered Property (1)

System and Method for Shifting Critical Dimensions of Patterned Films

Patent: 9,977,339 →

Application: 14/603,595 →

Publication: US 2015/0212421