Patent Assignment
Reel/Frame 034798/0435
Assignment of Assignor's Interest
Recorded: 2015-01-23
Pages: 2
Assignors
CHU, CHIA-HUA
Executed: 2012-10-16
CHENG, CHUN-WEN
Executed: 2012-10-16
LEE, TE-HAO
Executed: 2012-10-16
LIN, CHUNG-HSIEN
Executed: 2012-11-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
MEMS Devices and Fabrication Methods Thereof