Patent Assignment
Reel/Frame 034943/0469
Assignment of Assignor's Interest
Recorded: 2015-02-11
Pages: 3
Assignor
XU, CHENG-BAI
Executed: 2013-01-28
Assignee
ROHM AND HAAS ELECTRONIC MATERIALS LLC
455 FOREST STREET, MARLBOROUGH, MASSACHUSETTS, 01752
Covered Property
(1)
Photoresist Pattern Trimming Methods
Application:
13/731,940 →
Publication:
US 2013/0171574