Patent Assignment
Reel/Frame 034977/0270
Assignment of Assignor's Interest
Recorded: 2015-02-18
Pages: 6
Assignors
CHANG, SHENGWU
Executed: 2015-02-17
ROUNDS, KRISTEN S.
Executed: 2015-02-17
LEAVITT, WILLIAM
Executed: 2015-02-17
ST. PETER, MICHAEL
Executed: 2015-02-17
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, 022644, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Apparatus and Method to Control Ion Beam Current