Patent Assignment
Reel/Frame 035023/0661
Assignment of Assignor's Interest
Recorded: 2015-02-25
Pages: 3
Assignor
HAYASHI, DAISUKE
Executed: 2015-02-20
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Manufacturing Electrostatic Chuck Having Dot Structure on Surface Thereof