Patent Assignment
Reel/Frame 035039/0212
Assignment of Assignor's Interest
Recorded: 2015-02-26
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Cleaning Method, Substrate Cleaning Apparatus, and Computer-Readable Storage Medium