Patent Assignment
Reel/Frame 035064/0901
Assignment of Assignor's Interest
Recorded: 2015-03-02
Pages: 3
Assignors
GANDIKOTA, SRINIVAS
Executed: 2013-07-25
LIU, ZHENDONG
Executed: 2013-07-25
LEI, JIANXIN
Executed: 2013-07-24
JAKKARAJU, RAJKUMAR
Executed: 2013-07-29
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Lowering Tungsten Resistivity by Replacing Titanium Nitride with Titanium Silicon Nitride