Patent Assignment
Reel/Frame 035147/0681
Assignment of Assignor's Interest
Recorded: 2015-03-12
Pages: 3
Assignor
SHINOZAKI, HIROYUKI
Executed: 2014-12-23
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Film Thickness Measuring Device and Polishing Device