Patent Assignment
Reel/Frame 035165/0432
Assignment of Assignor's Interest
Recorded: 2015-03-13
Pages: 3
Assignor
IIZUKA, OSAMU
Executed: 2015-02-24
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHIN SUGITA CHO, ISOGO-KU, KANAGAWA, YOKOHAMA, 235-8522, JAPAN
Covered Property
(1)
Method for Correcting Drift of Charged Particle Beam, and Charged Particle Beam Writing Apparatus