Patent Assignment
Reel/Frame 035173/0445
Assignment of Assignor's Interest
Recorded: 2015-03-16
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System Having a Beam Deflection Array for Illuminating a Mask in a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.