Patent Assignment
Reel/Frame 035359/0444
Assignment of Assignor's Interest
Recorded: 2015-04-08
Pages: 3
Assignors
KANEKO, KAZUSHI
Executed: 2015-02-03
FUNAZAKI, KAZUNORI
Executed: 2015-02-05
KATO, HIDEO
Executed: 2015-02-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and High Frequency Generator