Patent Assignment
Reel/Frame 035398/0258
Assignment of Assignor's Interest
Recorded: 2015-04-13
Pages: 4
Assignors
XUE, JUN
Executed: 2015-02-25
GODET, LUDOVIC
Executed: 2015-02-24
CHEN, ERICA
Executed: 2015-02-23
NEMANI, SRINIVAS D.
Executed: 2015-02-23
YIEH, ELLIE Y.
Executed: 2015-02-25
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Air Gap Formation in Interconnection Structure by Implantation Process