Patent Assignment
Reel/Frame 035436/0373
Assignment of Assignor's Interest
Recorded: 2015-04-17
Pages: 6
Assignors
FUJIWARA, TAKAYUKI
Executed: 2015-03-31
SAGEHASHI, MASAYOSHI
Executed: 2015-03-31
HASEGAWA, KOJI
Executed: 2015-03-31
TANIGUCHI, RYOSUKE
Executed: 2015-03-31
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Monomer, Polymer, Resist Composition, and Patterning Process