Patent Assignment
Reel/Frame 035620/0491
Assignment of Assignor's Interest
Recorded: 2015-05-12
Pages: 9
Assignors
MULDER, HEINE MELLE
Executed: 2011-03-22
HANSEN, STEVEN GEORGE
Executed: 2011-03-21
MULKENS, JOHANNES CATHARINUS HUBERTUS
Executed: 2011-03-22
DEGUENTHER, MARKUS
Executed: 2011-04-29
Assignees
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System and Lithographic Apparatus