Patent Assignment
Reel/Frame 035631/0032
Assignment of Assignor's Interest
Recorded: 2015-05-13
Pages: 4
Assignors
MURO, NAOTSUGU
Executed: 2015-04-27
KAMIMURA, TETSUYA
Executed: 2015-04-30
INABA, TADASHI
Executed: 2015-04-27
MIZUTANI, ATSUSHI
Executed: 2015-04-27
Assignee
FUJIFILM CORPORATION
26-30, NISHIAZABU 2-CHOME, MINATO-KU, TOKYO, 106-8620, JAPAN
Covered Property
(1)
Etching Method of Semiconductor Substrate, and Method of Producing Semiconductor Device