Patent Assignment
Reel/Frame 035642/0225
Assignment of Assignor's Interest
Recorded: 2015-05-14
Pages: 4
Assignors
VARADARAJAN, BHADRI N.
Executed: 2015-05-06
GONG, BO
Executed: 2015-05-13
BATZER, RACHEL E.
Executed: 2015-05-06
QIU, HUATAN
Executed: 2015-05-07
VAN SCHRAVENDIJK, BART J.
Executed: 2015-05-06
HOHN, GEOFFREY
Executed: 2015-05-07
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(2)
Minimizing Radical Recombination Using Ald Silicon Oxide Surface Coating with Intermittent Restoration Plasma
Minimizing Radical Recombination
Application:
62/138,810 →