Patent Assignment
Reel/Frame 035702/0529
Assignment of Assignor's Interest
Recorded: 2015-05-22
Pages: 3
Assignors
NEMANI, SRINIVAS D.
Executed: 2014-12-16
YIEH, ELLIE Y.
Executed: 2014-12-16
GODET, LUDOVIC
Executed: 2014-12-16
FAN, YIN
Executed: 2014-12-16
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Selective Atomic Layer Deposition Process Utilizing Patterned Self Assembled Monolayers for 3D Structure Semiconductor Applications