Patent Assignment
Reel/Frame 035756/0219
Assignment of Assignor's Interest
Recorded: 2015-06-01
Pages: 5
Assignors
SEKI, MASAYA
Executed: 2015-04-14
TOGAWA, TETSUJI
Executed: 2015-04-23
ITO, KENYA
Executed: 2015-04-23
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Polishing Apparatus and Polishing Method