Patent Assignment
Reel/Frame 035764/0767
Assignment of Assignor's Interest
Recorded: 2015-06-02
Pages: 7
Assignors
KIM, MOOJIN
Executed: 2015-03-26
KIM, BONGSEONG
Executed: 2015-04-06
KOO, DEOGJA
Executed: 2015-04-03
WOO, JE-HUN
Executed: 2015-03-26
LEE, UNJOO
Executed: 2015-04-03
Assignee
SAMSUNG ELECTRONICS CO., LTD
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 443-742, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Apparatus and Method of Fabricating Semiconductor Device Using the Same