Patent Assignment
Reel/Frame 035773/0746
Assignment of Assignor's Interest
Recorded: 2015-06-03
Pages: 4
Assignors
LONG, MAOLIN
Executed: 2015-05-28
DREWERY, JOHN
Executed: 2015-05-28
PATERSON, ALEX
Executed: 2015-05-28
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Large Dynamic Range Rf Voltage Sensor and Method for Voltage Mode Rf Bias Application of Plasma Processing Systems