Patent Assignment
Reel/Frame 035803/0171
Assignment of Assignor's Interest
Recorded: 2015-06-08
Pages: 4
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method of Designing Metrology Targets, Substrates Having Metrology Targets, Method of Measuring Overlay, and Device Manufacturing Method