Patent Assignment
Reel/Frame 035846/0961
Assignment of Assignor's Interest
Recorded: 2015-06-16
Pages: 3
Assignor
PORE, VILJAMI
Executed: 2015-02-23
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Atomic Layer Deposition of Silicon Carbon Nitride Based Materials