Patent Assignment
Reel/Frame 035905/0007
Assignment of Assignor's Interest
Recorded: 2015-06-25
Pages: 4
Assignor
UEDA, TATSUSHI
Executed: 2015-05-18
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus
Application:
14/674,016 →
Publication:
US 2016/0153085