Patent Assignment
Reel/Frame 035986/0167
Assignment of Assignor's Interest
Recorded: 2015-06-30
Pages: 8
Assignors
CHENG, SZU-LIN
Executed: 2015-06-29
GUILLORN, MICHAEL A.
Executed: 2015-06-29
LAUER, GEN P.
Executed: 2015-06-29
LAUER, ISAAC
Executed: 2015-06-29
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Internal Spacer Formation from Selective Oxidation for Fin-First Wire-Last Replacement Gate-All-Around Nanowire Fet