Patent Assignment
Reel/Frame 036104/0721
Assignment of Assignor's Interest
Recorded: 2015-07-14
Pages: 2
Assignors
SEZGINER, ABDURRAHMAN
Executed: 2015-05-28
HENCH, JOHN
Executed: 2015-06-14
BAKEMAN, MICHAEL S.
Executed: 2015-06-11
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Scatterometry-Based Imaging and Critical Dimension Metrology