Patent Assignment
Reel/Frame 036134/0350
Assignment of Assignor's Interest
Recorded: 2015-07-20
Pages: 3
Assignors
OKAMURA, NAOYUKI
Executed: 2015-07-07
KOSAI, KAZUKI
Executed: 2015-07-07
TERAOKA, KAZUHIRO
Executed: 2015-07-07
KAMIMURA, FUMIHIRO
Executed: 2015-07-07
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method, Substrate Processing Apparatus, and Computer-Readable Storage Medium Stored with Substrate Processing Program