Patent Assignment
Reel/Frame 036159/0907
Confirmatory License
Recorded: 2015-07-22
Pages: 2
Assignor
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Executed: 2013-08-09
Assignee
NATIONAL SCIENCE FOUNDATION
4201 WILSON BLVD, ROOM 1265, ARLINGTON, VIRGINIA, 22230
Covered Property
(1)
Method and Apparatus for Depositing Films
Application:
13/153,470 →
Publication:
US 2011/0267390