Patent Assignment
Reel/Frame 036247/0641
Assignment of Assignor's Interest
Recorded: 2015-08-04
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method of Multilayered Film