Patent Assignment
Reel/Frame 036667/0874
Assignment of Assignor's Interest
Recorded: 2015-09-28
Pages: 7
Assignors
VUKKADALA, PRADEEP
Executed: 2015-09-23
SINHA, JAYDEEP
Executed: 2015-09-21
KIM, JONG-HOON
Executed: 2015-09-21
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Process-Induced Asymmetry Detection, Quantification, and Control Using Patterned Wafer Geometry Measurements