Assignment of Assignor's Interest

Recorded: 2015-09-29 Pages: 5

Assignor

HIROCHI, YUKITOMO

Executed: 2015-09-21

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN

Covered Property (1)

Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium

Application: 14/861,658 →

Publication: US 2017/0062254