Patent Assignment
Reel/Frame 036862/0084
Assignment of Assignor's Interest
Recorded: 2015-10-23
Pages: 3
Assignor
KAWASHIMA, HARUNA
Executed: 2015-07-14
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Light Source Apparatus, Illumination Device, Exposure Apparatus, and Device Manufacturing Method