Patent Assignment
Reel/Frame 037206/0943
Assignment of Assignor's Interest
Recorded: 2015-12-04
Pages: 6
Assignors
HEO, SEOK
Executed: 2015-08-14
KIM, SUN HO
Executed: 2015-08-17
LIM, CHAEMOOK
Executed: 2015-08-17
HWANG, JAECHUL
Executed: 2015-08-17
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129 SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 443-742, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Transfer Unit, Substrate Treating Apparatus Including the Same, and Substrate Treating Method