Patent Assignment
Reel/Frame 037334/0154
Assignment of Assignor's Interest
Recorded: 2015-12-18
Pages: 3
Assignors
SASAKI, YASUHARU
Executed: 2015-12-08
TOMIOKA, TAKETOSHI
Executed: 2015-12-08
KISHI, HIROKI
Executed: 2015-12-08
SUH, JISOO
Executed: 2015-12-08
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Electrostatic Chucking Method and Substrate Processing Apparatus