Patent Assignment
Reel/Frame 037609/0554
Assignment of Assignor's Interest
Recorded: 2016-01-28
Pages: 3
Assignor
NAGAMI, KOICHI
Executed: 2016-01-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Controlling Potential of Susceptor of Plasma Processing Apparatus