Patent Assignment
Reel/Frame 037619/0136
Assignment of Assignor's Interest
Recorded: 2016-01-29
Pages: 4
Assignors
FU, JIYOU
Executed: 2015-12-18
SAPIENS, NOAM
Executed: 2015-12-15
PETERLINZ, KEVIN A.
Executed: 2016-01-14
PANDEV, STILIAN IVANOV
Executed: 2016-01-28
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Methods and systems for Spectroscopic Beam Profile Metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element (As amended)