Patent Assignment
Reel/Frame 037647/0077
Assignment of Assignor's Interest
Recorded: 2016-02-02
Pages: 4
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Self-Limited Planarization of Hardmask
Patent:
9,640,409 →
Application:
15/013,400 →