Patent Assignment
Reel/Frame 037712/0625
Assignment of Assignor's Interest
Recorded: 2016-02-11
Pages: 8
Assignors
FAN, GARY
Executed: 2014-05-06
CHEN, DAVID
Executed: 2014-05-07
KINI, VIVEKANAND
Executed: 2014-06-10
XIAO, HONG
Executed: 2014-05-08
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method and System for Adaptively Scanning a Sample During Electron Beam Inspection