Patent Assignment
Reel/Frame 037799/0519
Assignment of Assignor's Interest
Recorded: 2016-02-23
Pages: 6
Assignors
YOU, JUNGGUN
Executed: 2016-02-12
CHOI, JEONGMIN
Executed: 2016-02-12
KIM, INGYUM
Executed: 2016-02-12
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI,GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Methods of Fabricating Semiconductor Devices Including Hard Mask Patterning