Assignment of Assignor's Interest

Recorded: 2016-02-24 Pages: 3

Assignor

MIURA, SHIGEHIRO

Executed: 2016-02-15

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Substrate Processing Method

Application: 15/051,801 →

Publication: US 2016/0260587