Patent Assignment
Reel/Frame 037818/0686
Assignment of Assignor's Interest
Recorded: 2016-02-24
Pages: 3
Assignee
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, 105-8001, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Apparatus and Manufacturing Method of Semiconductor Device
Application:
62/191,816 →