Patent Assignment
Reel/Frame 037824/0535
Assignment of Assignor's Interest
Recorded: 2016-02-25
Pages: 2
Assignor
IWATA, HIDEYUKI
Executed: 2016-02-15
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Multi-Beam Current Quantity Measuring Method, Multi-Charged Particle Drawing Control Device, and Multi-Charged Particle Beam Drawing Device