Patent Assignment
Reel/Frame 037898/0896
Assignment of Assignor's Interest
Recorded: 2016-03-04
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Using Multiple Inductive and Capacitive Fixtures for Applying a Variety of Plasma Conditions to Determine a Match Network Model