Patent Assignment
Reel/Frame 037934/0173
Assignment of Assignor's Interest
Recorded: 2016-03-09
Pages: 7
Assignors
KIM, MYEONG KOO
Executed: 2015-12-10
CHOI, AHREUM
Executed: 2015-12-11
KIM, BOODEUK
Executed: 2015-12-10
YI, SONGSE
Executed: 2015-12-02
CHOI, JUNGSIK
Executed: 2015-12-02
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 443-742, KOREA, REPUBLIC OF
Covered Property
(1)
Polymers for Hard Masks, Hard Mask Compositions Including the Same, and Methods for Forming a Pattern of a Semiconductor Device Using a Hard Mask Composition