Patent Assignment
Reel/Frame 038123/0377
Assignment of Assignor's Interest
Recorded: 2016-03-29
Pages: 4
Assignee
INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
YONSEI UNIVERSITY, 50 YONSEI-RO, SEODAEMUN-GU, SEOUL, 120-749, KOREA, REPUBLIC OF
Covered Property
(1)
Method and Apparatus for Forming Thin Oxide Film