Patent Assignment
Reel/Frame 038173/0759
Assignment of Assignor's Interest
Recorded: 2016-04-01
Pages: 3
Assignors
SRIRAMAN, SARAVANAPRIYAN
Executed: 2016-03-10
PATERSON, ALEXANDER
Executed: 2016-03-10
KAMP, TOM A.
Executed: 2016-03-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Extreme Edge Sheath and Wafer Profile Tuning Through Edge-Localized Ion Trajectory Control and Plasma Operation