Patent Assignment
Reel/Frame 038222/0768
Assignment of Assignor's Interest
Recorded: 2016-04-07
Pages: 3
Assignors
CHENG, WEN-HAO
Executed: 2016-03-29
YOO, CHUE-SAN
Executed: 2016-03-29
WU, TSIAO-CHEN
Executed: 2016-03-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Apparatus for Shielding Reticle