Patent Assignment
Reel/Frame 038224/0191
Assignment of Assignor's Interest
Recorded: 2016-04-08
Pages: 3
Assignor
EGASHIRA, SHINICHI
Executed: 2015-12-01
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Measurement Apparatus, Lithography Apparatus, and Method of Manufacturing Article