Patent Assignment
Reel/Frame 038278/0760
Assignment of Assignor's Interest
Recorded: 2016-03-29
Pages: 5
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Oblique Incidence Scanning with 2D Array of Spots