Patent Assignment
Reel/Frame 038324/0143
Assignment of Assignor's Interest
Recorded: 2016-04-19
Pages: 3
Assignors
HOWALD, ARTHUR M.
Executed: 2016-04-13
VALCORE, JOHN C., JR.
Executed: 2016-04-13
FONG, ANDREW
Executed: 2016-04-13
HOPKINS, DAVID
Executed: 2016-04-12
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Tuning an Impedance Matching Network in a Step-Wise Fashion for Multiple States of an Rf Generator