Patent Assignment
Reel/Frame 038340/0600
Assignment of Assignor's Interest
Recorded: 2016-04-21
Pages: 3
Assignors
HOWALD, ARTHUR M.
Executed: 2016-04-13
VALCORE, JOHN C., JR.
Executed: 2016-04-13
FONG, ANDREW
Executed: 2016-04-13
HOPKINS, DAVID
Executed: 2016-04-12
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Using Computer-Generated Models to Reduce Reflected Power Towards an Rf Generator During State Transitions of the Rf Generator by Controlling Rf Values of the Rf Generator